Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. 

The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures. 

The emphasis will be on processing, measurement and phenomena, and will include vacuum processing, plasma processing, materials and structural characterization, microlithography, and the physics and chemistry of submicron and nanometer structures and devices.