Cluster Tools in IC Processing: Technology and Market Forecasts

Chapter 1 Introduction 1-1

Chapter 2 Executive Summary 2-1

2.1 Summary of Technical Issues 2-1
2.2 Summary of Market Forecast 2-4

Chapter 3 Interface Standards 3-1

3.1 SEMI/MESC 3-1
3.2 SECS I and SECS II 3-8
3.3 High-Speed SECS Message Services (HSMS) Standard 3-12
3.4 GEM 3-14
3.5 Standards Directions 3-15

Chapter 4 The Cluster Concept 4-1

4.1 Definitions 4-1
4.2 Device Technology and Integrated Processing 4-4
4.3 Main Functional Units 4-8
4.3.1 Central Handling Platform 4-8
4.3.2 Cassette Stations 4-8
4.3.3 Extension Modules 4-9
4.3.4 Single Process Modules 4-9
4.3.5 Batch Modules 4-10
4.3.6 Multiple Process Modules 4-10
4.4 Cluster Tool Communications 4-12
4.4.1 Cluster Tool Controller 4-15
4.4.2 Transport Module Controller 4-15
4.4.3 Process Module Controller 4-16
4.4.4 Control Software 4-16
4.4.5 Human Interface Software 4-17
4.4.6 Networking Software 4-18
4.5 Vacuum System Design 4-19

Chapter 5 Commercial Cluster Tools 5-1

5.1 Cluster Tools and Suppliers 5-1
o Aixtron 5-6
o Applied Materials 5-7
o ASM International 5-10
o Brooks Automation 5-12
o Canon 5-15
o Canon Anelva 5-17
o Ebara 5-19
o Evatec 5-20
o Genmark Automation 5-21
o Hitachi High Technologies 5-22
o IPS 5-23
o Jusung Engineering 5-24
o KLA-Tencor 5-25
o Kornic Automation 5-25
o Lam Research 5-26
o Nanometrics 5-28
o Nova Measuring Systems 5-29
o Oxford Instruments Plasma Technology 5-29
o Picosun 5-31
o Primaxx / SPTS Technologies 5-32
o Rorze 5-34
o Sentech 5-34
o Singulus Technologies 5-34
o Suss MicroTec AG 5-35
o Tek-Vac 5-36
o Tokyo Electron 5-37
o Ulvac 5-40

Chapter 6 Cluster Tool Process Trends 6-1

6.1 Introduction 6-1
6.2 Deposition - Plasma Etch 6-4
6.3 Deposition - Rapid Thermal Processing 6-4
6.4 Lithography - Resist Processing 6-6
6.5 Diagnostics - Process 6-8
6.6 CMP Polish - Clean 6-9

Chapter 7 Cluster Tool Issues 7-1

7.1 Introduction 7-1
7.2 Equipment Reliability 7-2
7.3 Equipment Maintainability 7-3
7.4 Challenges 7-7
7.5 Opportunities 7-9

Chapter 8 Economic and Human Resource Issues 8-1

8.1 Introduction 8-1
8.2 Economic Justification 8-1
8.2.1 Background 8-1
8.2.2 Cost Justification 8-2
8.2.3 Reserves 8-4
8.2.4 Personnel Costs 8-4
8.2.5 Other ROI Considerations 8-4
8.3 Human Resources Impact 8-5
8.3.1 Background 8-5
8.3.2 Direct Labor 8-6
8.3.3 Equipment Support 8-7
8.3.4 Process Engineering 8-9
8.3.5 Operations Staff 8-10

Chapter 9 Market Forecast 9-1

9.1 Introduction 9-1
9.2 Market Forecast Assumptions 9-5
9.3 Market Forecast 9-6
9.3.1 Total Available Vacuum Cluster Tool Market 9-7
9.3.2 Vacuum Cluster Tool Market 9-10
9.3.3 Non-Vacuum Cluster Tool Market 9-15
9.3.4 Total Cluster Tool Market 9-19
9.3.5 Total Semiconductor Processing Equipment Market 9-21

FIGURES

3.1 Trend in Use of SECS by Equipment Manufacturers 3-13
4.1 Basic Cluster Tool Architecture 4-2
4.2 Basic Cluster Tool Architecture 4-3
4.3 Communication Architecture in a Cluster Tool 4-13
5.1 Applied Material’s Endura 5-9
5.2 Brooks Automation’s Marathon 2 Quad 5-14
5.3 Canon’s Nanoimprint System Containing 4 Imprint Stations 5-16
5.4 PRIMAXX 8-Sided Cluster System 5-33
6.1 Multi-Patterning Adds Many Process Steps 6-3
6.2 Deposition-Etching Steps In Quadruple Patterning 6-5
6.3 Lithography Steps For 3D NAND 6-7
8.1 Segmentation of Operator Processing Functions 8-3
9.1 Shares of the Total Available Equipment Market By Equipment
Type - 2014 9-9
9.2 Vacuum Cluster Tool Market Forecast t 9-12
9.3 Vacuum Cluster Tool Market Share of Suppliers - 2014 9-13
9.4 Vacuum Cluster Tools as Percentage of Supplier
Revenues - 2014 9-14
9.5 Non-Vacuum Cluster Tool Market Forecast 9-17
9.6 Non-Vacuum Cluster Tool Market Share of Suppliers - 2014 9-18
9.7 Total Cluster Tool Market Forecast 9-20
9.8 Global Processing Equipment Market Forecast 9-22
9.9 Vacuum Cluster Tools As Percentage Of Total Processing Equipment Market 9-24
9-10 Non-Vacuum Cluster Tools As Percentage Of Total Processing Equipment Market 9-25

TABLES

3.1 Corporate Participants in SEMI/MESC 3-3
4.1 Model for 300mm LOGIC Production Line 4-5
4.2 Model for 200mm LOGIC Production Line 4-6
9.1 Total Available Vacuum Cluster Tool Market Forecast 9-8
9.2 Vacuum Cluster Tool Market Forecast 9-11
9.3 Non-Vacuum Cluster Tool Market Forecast 9-16
9.4 Top 10 Processing Equipment Market Shares 9-23