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The Global MEMS Device, Equipment, and Materials Markets: Forecasts and Strategies for Vendors and Foundries

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Published: 2014/12/04

Chapter 1    The MEMS Market Infrastructure                                1-1

 

Chapter 2   Forecast Of The Key Applications And Markets           2-1

                  

2.1     MEMS Device Market Forecast                                                 2-1

2.1.1  Ink Jet Head                                                                            2-3

2.1.2  Pressure Sensor                                                                        2-6

2.1.3  Silicon Microphone                                                                  2-8

2.1.4  Accelerometer                                                                          2-13

2.1.5  Gyroscope                                                                                2-17

2.1.6  Micro Display                                                                          2-20

2.1.7  Other MOEMS                                                                        2-24

2.1.8  Microfluidics                                                                           2-28

2.1.9  RF MEMS                                                                               2-31

2.1.10 Digital Compass                                                                       2-35

2.1.11 Inertial Sensor                                                                          2-37

2.1.12 Emerging Applications                                                             2-39

2.2     MEMS System Market Forecast                                                2-42

2.2.1  Automotive Systems                                                                 2-48

2.2.2  Aeronautics Systems                                                                 2-50

2.2.3  Consumer Systems                                                                   2-52

2.2.4  Defense Systems                                                                       2-54

2.2.5  Industrial Systems                                                                    2-56

2.2.6  Medical/Life Sciences Systems                                                  2-58

2.2.7  Telecom Systems                                                                      2-60

                  

Chapter 3    Markets for Equipment and Materials Suppliers           3-1

                  

3.1     Introduction                                                                             3-1

3.2     MEMS Equipment Markets                                                       3-2

3.2.1  Assembly                                                                                 3-4

3.2.2  Bonding                                                                                   3-7

3.2.3  Cleaning                                                                                   3-10

3.2.4  Deposition                                                                                3-12

3.2.5  Dicing                                                                                      3-18

3.2.6  Etching                                                                                    3-20

3.2.7  Laser Micromachining                                                              3-26

3.2.8  Lithography                                                                              3-31

3.2.9  Metrology/Inspection                                                                3-36

3.2.10 Testing                                                                                     3-39

3.2.11 Thermal Treatment                                                                   3-42

3.2.12 Wafer Thinning                                                                        3-44

3.3     MEMS Material Markets                                                           3-47

3.3.1  Chemicals                                                                                3-47

3.3.2  Photomasks                                                                              3-50

3.3.3  Substrates                                                                                 3-53

                  

Chapter 4   MEMS Foundries                                                           4-1

                  

4.1     Foundry Profiles and Strategies                                                 4-1

4.1.1  Advanced Microsensors                                                             4-3

4.1.2  Agiltron                                                                                   4-3

4.1.3  Asia Pacific Microsystems                                                         4-4

4.1.4  Beijing First MEMS                                                                  4-4

4.1.5  Bosch                                                                                       4-5

4.1.6  China Resources Semiconductor                                               4-5

4.1.7  Colibrys                                                                                    4-6

4.1.8  C2V                                                                                         4-7

4.1.9  Dai-Nippon Printing                                                                 4-7

4.1.10 Dalso                                                                                       4-8

4.1.11 Freescale                                                                                  4-9

4.1.12 GLOBALFOUNDRIES                                                             4-9

4.1.13 Honeywell MEMSplus                                                              4-10

4.1.14 Infineon Technologies SensoNor As                                          4-10

4.1.15 Institute of Microelectronics                                                     4-11

4.1.16 Innovative Micro Tech                                                              4-12

4.1.17 Integrated Sensing Systems Inc. (ISSYS)                                   4-13

4.1.18 LioniX                                                                                     4-13

4.1.19 MEMS Engineering and Material                                              4-14

4.1.20 MEMSCAP                                                                              4-14

4.1.21 Micralayne                                                                               4-15

4.1.22 Micrel                                                                                          4-15

4.1.23 Midwest MicroDevices, LLC                                                     4-16

4.1.24 Nanostructures Inc                                                                   4-16

4.1.25 Norcada Inc.                                                                             4-17

4.1.26 Olympus                                                                                  4-17

4.1.27 Omron                                                                                     4-18

4.1.28 Proton Mikrotechnik                                                                4-19

4.1.29 Semiconductor Manufacturing International Corporation          4-19

4.1.30 SEMEFAB                                                                               4-20

4.1.31 Silex Microsystems                                                                   4-20

4.1.32 Sony                                                                                        4-20

4.1.33 ST Microelectronics                                                                  4-21

4.1.34 Taiwan Semiconductor Manufacturing Co Ltd (TSMC)             4-21

4.1.35 Texas Instruments                                                                    4-22

4.1.36 Touch Microsystems                                                                 4-22

4.1.37 Tronics Microsystems                                                               4-23

4.1.38 X-Fab                                                                                       4-24

4.2   Small-Mid-Sized Companies                                                     4-25

                  

Chapter 5   Factors for Foundry Success                                          5-1

                  

5.1.1  Achieving Economies Of Scale                                                  5-1

5.1.2  Competitive Advantages                                                           5-2

5.1.3  Core Strengths                                                                          5-3

5.1.4  Employee Commitment                                                            5-3

5.1.5  Expansion Plans                                                                       5-3

5.1.6  Financial Objectives:                                                                 5-4

5.1.7  Groundbreaking MEMS Solutions                                             5-4

5.1.8  In- House Expertise in MEMS Testing And Reliability               5-4

5.1.9  Leadership in Technology                                                         5-5

5.1.10 Manufacturing Excellence                                                         5-5

5.1.11 Manufacturing Process                                                              5-7

5.1.12 Mastering Process and Production Technology                           5-7

5.1.13 Patent Protection                                                                      5-7

5.1.14 Partnerships                                                                              5-8

5.1.15 Products                                                                                   5-8

5.1.16 Proprietary Development Processes                                            5-9

5.1.17 Sales Organization                                                                    5-9

5.1.18 Sales Process and Customer Base                                              5-9

5.1.19 Strong Customer Relations                                                       5-10

5.1.20 Vision and Goal                                                                        5-10

                  

Chapter 6    Critical MEMS Issues                                                    6-1

                  

6.1     3-D Interconnects and Packaging                                              6-1

6.2     Wafer Size                                                                                6-12

6.3     MEMS Testing                                                                         6-15

6.4     Opportunities For Fabless MEMS Companies                            6-19

 

 

 

 

 

 

 

 

 

 

 

 

 

LIST OF TABLES

 

                                                                                                          Page

         

4.1     Top MEMS Foundries by Revenues                                           4-2

                  

LIST OF FIGURES

 

                                                                                                          Page

 

2.1     MEMS Markets                                                                        2-2

2.2     Ink Jet Head Sales Forecast                                                     2-5

2.3     Pressure Sensor Sales Forecast                                                2-7

2.4     Silicon Microphone Sales Forecast                                          2-12

2.5     Accelerometer Sales Forecast                                                  2-16

2.6     Gyroscope Sales Forecast                                                        2-19

2.7     Micro Display Sales Forecast                                                   2-23

2.8     Other MOEMS Sales Forecast                                                 2-27

2.9     Microfluidics Sales Forecast                                                     2-30

2.10   RF MEMS Sales Forecast                                                        2-34

2.11   Digital Compass Sales Forecast                                                2-36

2.12   Inertial Sensor Sales Forecast                                                    2-38

2.131 Emerging Applications Sales Forecast                                     2-41

2.12   Automotive System Sales Forecast                                          2-49

2.15   Aeronautics System Sales Forecast                                          2-51

2.16   Consumer System Sales Forecast                                             2-53

2.17   Defense System Sales Forecast                                                2-55

2.18   Industrial System Sales Forecast                                              2-57

2.19   Medical System Sales Forecast                                                 2-59

2.20   Telecom System Sales Forecast                                                2-61

3.1     Discrete Assembly of MEMS                                                     3-5

3.2     Assembly Equipment Sales Forecast                                        3-6

3.3     Bonding Equipment Sales Forecast                                          3-9

3.4     Cleaning Equipment Sales Forecast                                         3-11

3.5     Deposition Equipment Sales Forecast                                       3-17

3.6     Dicing Equipment Sales Forecast                                             3-19

3.7     Schematic Of DRIE                                                                  3-22

3.8     Etching Equipment Sales Forecast                                           3-25

3.9     Laser Micromachining Equipment Sales Forecast                     3-30

3.10      Driving Principle Of The MOR (a) Parallel State (B) Tilted State      3-33

3.11   Lithography Equipment Sales Forecast                                    3-35

3.12   Metrology/Inspection Equipment Sales Forecast                       3-38

3.13   Testing Equipment Sales Forecast                                            3-41

3.14   Thermal Treatment Equipment Sales Forecast                          3-43

3.15   Wafer Thinning Equipment Sales Forecast                               3-46

3.16   Chemicals Sales Forecast                                                         3-49

3.17   Photomasks Sales Forecast                                                      3-52

3.18   Substrates Sales Forecast                                                         3-54

3.19   Wafer Starts By Substrate Size                                                  3-56

6-1     Process For Capping MEMS                                                     6-5

6-2     Examples Of Thermoplastic Cavity Packages                             6-6

6.3    Fluidic Packaging System                                                         6-8

6.4     Forecast of Wafer Size                                                              6-14

6-5     Fluidic Packaging System                                                         6-18

 

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